0-12.5mm 0.05mm 0.2mm 0.5mm 0.8mm 1mm 2mm 3mm 5mm 7mm 10mm 12mm 25mm 25~35mm 30mm 35~65mm 50mm 65~135mm 75mm 100mm 120~280mm 130mm 150mm 175mm 200mm 200~600mm 225mm 250mm 275mm 300mm 325mm 360mm 375mm 400mm 450mm 500mm 550mm 600mm 750mm 900mm ±0.2mm ±0.3mm ±0.9mm ±1mm

0.0125µm 0.05µm 0.125µm 0.2µm 0.25µm 0.5µm 0.75µm 1µm 1.25µm 1.75µm 2.5µm 3µm 5µm 20µm 30µm ±1%FS ±0.1%FS ±0.5%FS ±0.3%FS ±0.25%FS ±0.2%FS(＜400mm) ±0.3%FS(＞400mm) ±0.2%FS ±0.15%FS ±(0.3+3×│L│³)μm, (L为mm) ±0.09%FS ±0.08%FS ±0.075%FS ±0.07%FS ±0.06%FS ±0.05%FS ±0.04%FS ±(0.2+3×│L│³)μm, (L为mm) 整体: ±2µm

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